In a recent study, researchers developed high-temperature platinum thin-film resistance temperature detectors (RTDs) using Al2O3 transition layers on SiC substrates. The RTDs demonstrated ...

An ultrasensitive pressure sensor integrated thin-film transistor (TFT) was fabricated by using In-Sn–Zn-O (ITZO) thin film as an active channel layer and hydrothermally grown ZnO nanorods (ZnO NRs) ...

Bismuth titanate, Bi/sub 4/Ti/sub 3/O/sub 12/ thin film pressure sensor was fabricated by sol gel method. The Bi/sub 4/Ti/sub 3/O/sub 12/ thin film was synthesized on substrate Si/ SiO/sub 2/ / ...

The pressure-dependent resistance of a sensitized rubber thin film was used in a variety of sensor devices 1,8,11,12, but was insensitive in the low-pressure regime (<1 g mm −2, < ∼ 10 kPa ...