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Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology - IEEE Xplore
MEMS sensors are promising for Energy Efficient Building (EeB) because of the potential low cost and low power consumption. Various flow sensors based on MEMS technology have been fabricated. In this ...
For the first time, a CMOS compatible calorimetric flow sensor with a dual-heater (DH) structure is proposed instead of using the traditional single-heater (SH) design. CFD simulation results ...
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