In such cases, a substitute gas may be employed, but this necessitates the use of a mass flow conversion factor (K) to ensure the accuracy of MFC flow relative to the process gas. Essentially, the gas ...

It is possible to measure rates of delivery in terms of either mass or volume per unit of time, and choosing between them is based on the application. In a number of situations volumetric flow ...

They were designed with flow sensors that do not measure gas mass flow directly—they “infer” the flow rate. This meant that the flow measuring system also required temperature and pressure ...