Genmark Automation’s MiniMax™ system Equipment Front End Module (EFEM) is designed to interface with various semiconductor processing equipment and back-end systems. Ranging in size, based on the ...

Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In operating ...

Designed for applications in the 868/900-MHz Industrial-Scientific-Medical (ISM) band, model RFFM6904 is a single-chip front-end module (FEM) ideal for portable equipment. Based on GaAs HBT technology ...

Abstract: Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In ...